FEI Helios NanoLab 660 SEM/FIB

Equipment Type

Scanning Electron Microscope

Manufacturer

FEI

Model

FEI Helios NanoLab 660 SEM/FIB

Location

Electron Microscopy

Processes

Scanning Electron Microscope / Focused Ion Beam

The FEI Helios NanoLab 660 features the most recent advances in field emission SEM (FESEM) and focused ion beam (FIB) technologies and their combined use. This DualBeam SEM/FIB is designed for demanding nanoscale work, resolving the finest details in 2D and 3D with clearest contrast, preparing the thinnest and highest quality samples, and most rapidly creating prototype devices with critical dimensions of a few nanometers only.

fei_helios660