Scanning Electron Microscope
FEI Helios NanoLab 660 SEM/FIB
Scanning Electron Microscope / Focused Ion Beam
The FEI Helios NanoLab 660 features the most recent advances in field emission SEM (FESEM) and focused ion beam (FIB) technologies and their combined use. This DualBeam SEM/FIB is designed for demanding nanoscale work, resolving the finest details in 2D and 3D with clearest contrast, preparing the thinnest and highest quality samples, and most rapidly creating prototype devices with critical dimensions of a few nanometers only.